EEE 549 Nanoscale Fabrication Technologies for Semiconductors

This graduate course walks you through how a modern chip actually gets built atom-by-atom on silicon, tying together device physics, materials, and the process flow that turns a bare wafer into working CMOS at nanometer scales. Expect a project plus periodic quizzes and two open-book midterms, with the project carrying most of the workload as you dig into a specific fabrication step or emerging technology and present it. It sits on top of undergraduate semiconductor and device physics, and is essentially the bridge between knowing how a MOSFET works on paper and understanding what cleanrooms, lithography, and ion implantation are doing to make one real.